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2006

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F25

Nanometer measuring machine

Carl Zeiss IMT GmbH

This 3D coordinate measuring machine with air bearings features a measuring volume of one cubic decimeter. The ultra-precision kinematics combined with a highly accurate measuring system enables a measurement uncertainty in the nanometer range. Thanks to this high degree of resolution and the optimized control response of the linear drives, drill holes with diameters of less than one millimeter can be measured tactilely with the application of only minute tactile forces.

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